Integrated tunneling sensor for nanoelectromechanical systems

Nanoelectromechanical Systems and Modeling

REVIEW ARTICLE Nanoelectromechanical systems

Nanoelectromechanical systems sNEMSd are drawing interest from both technical and scientific communities. These are electromechanical systems, much like microelectromechanical systems, mostly operated in their resonant modes with dimensions in the deep submicron. In this size regime, they come with extremely high fundamental resonance frequencies, diminished active masses, and tolerable force c...

Entanglement of nanoelectromechanical oscillators by Cooper-pair tunneling

Stefan Walter,1,2 Jan Carl Budich,3 Jens Eisert,4 and Björn Trauzettel1 1Institute for Theoretical Physics and Astrophysics, University of Würzburg, 97074 Würzburg, Germany 2Department of Physics, University of Basel, Klingelbergstrasse 82, CH-4056 Basel, Switzerland 3Department of Physics, Stockholm University, SE-106 91 Stockholm, Sweden 4Qmio Group, Dahlem Center for Complex Quantum Systems,...

24 Nanoelectromechanical Systems – Experiments andModeling

Nanoelectromechanical systems (NEMS) aremade of electromechanical devices that have critical dimensions from hundreds down to a few nanometers. By exploring nanoscale effects, NEMS present interesting and unique characteristics, which deviate greatly from their predecessor microelectromechanical systems (MEMS). For instance, NEMS-based devices can have fundamental frequencies in the microwave r...

Monocrystalline silicon carbide nanoelectromechanical systems

SiC is an extremely promising material for nanoelectromechanical systems given its large Young’s modulus and robust surface properties. We have patterned nanometer scale electromechanical resonators from single-crystal 3C-SiC layers grown epitaxially upon Si substrates. A surface nanomachining process is described that involves electron beam lithography followed by dry anisotropic and selective...